摘要 |
PROBLEM TO BE SOLVED: To solve the problem wherein measurement becomes unstable due to the condensation on a glass plate covering the liquid surface, when the liquid temperature is lowered in the observation within the liquid. SOLUTION: This scanning probe microscope for detecting a physical quantity acting between a probe and a sample by using light is equipped with a cell for storing the probe and the sample in the liquid; a transmission means in contact with the liquid surface in the cell, for transmitting light; a sample cooling means for cooling the sample and the liquid; and a gas replacement means for replacing gas in contact with the surface transmitting the light of the transmission means. COPYRIGHT: (C)2005,JPO&NCIPI
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