发明名称 SCANNING PROBE MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To solve the problem wherein measurement becomes unstable due to the condensation on a glass plate covering the liquid surface, when the liquid temperature is lowered in the observation within the liquid. SOLUTION: This scanning probe microscope for detecting a physical quantity acting between a probe and a sample by using light is equipped with a cell for storing the probe and the sample in the liquid; a transmission means in contact with the liquid surface in the cell, for transmitting light; a sample cooling means for cooling the sample and the liquid; and a gas replacement means for replacing gas in contact with the surface transmitting the light of the transmission means. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2005241281(A) 申请公布日期 2005.09.08
申请号 JP20040047813 申请日期 2004.02.24
申请人 JEOL LTD 发明人 NAKAMOTO KEIICHI
分类号 G01B11/24;G01Q20/02;G01Q30/08;G01Q30/10;G01Q30/12;G01Q30/14;G01Q30/20;G01Q60/24;(IPC1-7):G01N13/10;G01N13/16 主分类号 G01B11/24
代理机构 代理人
主权项
地址