| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to output a balanced input as a balanced output by particularizing the arrangement of input and output electrodes. SOLUTION: In the MEMS resonator including: first and second input electrodes 11, 12 for inputting a signal; first and second output electrodes 21, 22 for outputting a signal; and an oscillator 31 opposing to the first and second input electrodes 11, 12 and the first and second output electrodes 21, 22 via a space 41, the input electrodes 11, 12 receive a balanced signal, and the output electrodes 21, 22 output a balanced signal, and for example, the first input electrode 11 and the first output electrode 21 are arranged at positions at which the phases of the amplitude of the oscillator 31 become the same phase, and the second input electrode 12 and the second output electrode 22 are arranged at positions at which the phases of the amplitude of the oscillator 31 has the same phase and is different from the phase of the amplitude of the oscillator 31 at the position of the first input electrode 11 by 180 degrees. COPYRIGHT: (C)2005,JPO&NCIPI
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