发明名称 |
Optical switch and production method thereof |
摘要 |
An optical device according to an embodiment of the present invention has an actuator structure (3). The actuator structure has a substrate (8), a stationary electrode (10), a movable electrode (12), an optical element, and a hole portion. The stationary electrode is provided on a surface of the substrate. The movable electrode is provided on the surface of the substrate. The optical element is provided on the movable electrode. The substrate faces the movable electrode. The hole portion (18) is formed in a part of the substrate. A region near the movable electrode where the optical element is provided is immersed in a matching oil. <IMAGE>
|
申请公布号 |
EP1571472(A1) |
申请公布日期 |
2005.09.07 |
申请号 |
EP20050004313 |
申请日期 |
2005.02.28 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
SHIMAZU, TAKAYUKI;KANIE, TOMOHIKO;KATAYAMA, MAKOTO |
分类号 |
G02B26/08;B81B3/00;B81C1/00;G02B6/35;(IPC1-7):G02B6/35 |
主分类号 |
G02B26/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|