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发明名称
Messung und Fehlerausgleichung bei Interferometern
摘要
申请公布号
DE10393243(T5)
申请公布日期
2005.09.01
申请号
DE2003193243T
申请日期
2003.09.09
申请人
ZYGO CORP., MIDDLEFIELD
发明人
HILL, HENRY A.
分类号
G01B11/00;G01B9/02;G01B11/30;H01L21/027;(IPC1-7):G01B9/02
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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