FLUID SENSOR OF ANTICORROSIVE METAL AND FLUID SUPPLY DEVICE USING SAME

摘要

A fluid sensor of an anticorrosive metal comprises a thermal mass flow sensor having an enhanced anticorrosiveness. The measurement accuracy is stable against pressure variation, the response is improved, the senor is free of particles, variation of product quality is prevented, and pressure measurement is possible. A fluid supply device using this fluid sensor is also disclosed. Specifically, the fluid sensor comprises an anticorrosive metal substrate (2), a mass flow sensor section (1) composed of a thin film forming a temperature sensor (3a) and a heater (3b) provided on the back side opposite to the front side of a fluid-contact body of the anticorrosive metal substrate (2), and a pressure sensor section (4) composed of a thin film forming a strain sensor element (4a) provided on the back side opposite to the front side of the fluid-contact body of the anticorrosive metal substrate (2). This fluid sensor is for measuring the mass flow and pressure of a fluid.