| 发明名称 |
ANTI-REFLECTIVE COATING COMPOSITIONS FOR USE WITH LOW K DIELECTRIC MATERIALS |
| 摘要 |
Anti-reflective or fill composition which inhibits or blocks via or photoresist poisoning, a method of coating a substrate and curing it, and a cured protective layer derived therefrom comprises a polymer prepared from a first set of recurring monomers containing a ring member reacted with a light attenuating compound, and a second set of recurring monomers having an unreacted ring member.
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| 申请公布号 |
KR20050084140(A) |
申请公布日期 |
2005.08.26 |
| 申请号 |
KR20057010098 |
申请日期 |
2005.06.03 |
| 申请人 |
BREWER SCIENCE INC. |
发明人 |
PULIGADDA RAMA;LAMB JAMES E.;FLAIM TONY D. |
| 分类号 |
H01L21/312;B05D3/02;B32B17/10;C08F20/26;C08F20/32;C08F220/28;C08G59/32;C08J7/04;C09D163/00;G03F7/09;G03F7/11;H01L;H01L21/027;H01L21/311;(IPC1-7):G03F7/11 |
主分类号 |
H01L21/312 |
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