PULSE ELECTRON BEAM IRRADIATION EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To unify dose distribution in electron beam irradiation using a pulse electron beam to a processing object in a carrying state.

SOLUTION: A pulse electron beam irradiation equipment irradiates a pulse electron beam with a beam irradiation frequency Fb to the object being carried at carrying velocity Vc by scanning with a scan width W and a beam scan frequency Fs. When the carrying velocity Vc and the scan width W are set to fixed values and either of the beam irradiation frequency Fb and the beam scan frequency Fs is set a fixed value, the other one of the beam irradiation frequency Fb or the beam scan frequency Fs is optimized so that the dose distribution of the pulse electron beam becomes most uniform.

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