| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for manufacturing a high purity SiO solid at a high production rate. SOLUTION: In this method of manufacturing the SiO solid in which SiO solid is manufactured by heating a raw material containing a SiO<SB>2</SB>and a raw material containing Si under a reduced pressure, generating an SiO gas, and cooling the SiO gas to precipitate the SiO solid; the raw material containing the SiO<SB>2</SB>is layered as a lower layer in a raw material receiving vessel and the raw material containing the Si is layered as an upper layer, then heated. COPYRIGHT: (C)2005,JPO&NCIPI
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