| 摘要 |
PROBLEM TO BE SOLVED: To easily change the direction of a workpiece without increasing facility space, deteriorating carrying efficiency, enlarging device size, and increasing cost. SOLUTION: In this carriage, a carriage main body 10a runs along rails placed on a ceiling, so that a wafer carrier is carried between a storage and a process, and to each processing device in the process. On the carriage main body 10a, a lift 30 is provided to be movable by a lift mechanism 31. On the lift 30, a load grasping part 36 is provided, and the load grasping part 36 is rotatable around a vertical axis by a grasping part rotating mechanism 40. The grasping part rotating mechanism 40 comprises a revolving table 41 that is embedded in a bottom part of the lift 30 to be rotatable around the vertical axis, and a revolving motor 42 as a drive source for the revolving table 41. COPYRIGHT: (C)2005,JPO&NCIPI
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