发明名称 Optical displacement sensor, and external force detecting device
摘要 In a six-axis force sensor, each optical displacement sensor comprises an optical module to emit a light and a reflecting member to reflect the light back to the optical module, such that the optical axis of the light from the optical module is aligned to the axial direction of the six-axis force sensor, rather than to the radial direction. Consequently, the six-axis force sensor can be downsized in the radial direction.
申请公布号 US2005185196(A1) 申请公布日期 2005.08.25
申请号 US20050053401 申请日期 2005.02.08
申请人 MINEBEA CO., LTD. 发明人 KITAMURA ATSUSHI;ADACHI SHIGEYUKI
分类号 G01L5/16;G01B11/00;G01B11/16;(IPC1-7):G01B11/14 主分类号 G01L5/16
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