Line sensor

摘要

The line sensor 100 comprises an image pick-up part 10 , charge integrator 20 and charge output part 30. The image pick-up part comprises an N pixel parts 11 ₁ to 11 _N arranged in one direction, an nth pixel part 11 _n comprises an M photosensitive regions 12 _1,n to 12 _M,n that generate and accumulate charge in response to an incident energy beam. The charge integrator 20 comprises an N integrators 21 ₁ to 21 _N, and the charge output part 30 comprises an N output parts 31 ₁ to 31 _N. The charges generated and accumulated by each of the M photosensitive regions 12 _1,n to 12 _M,n that the nth pixel part 11 _n comprises are accumulated and integrated by the nth integrator 21 _n and output to the nth output part 31 _n in a batch.