Wet-etching device for photo-electrochemical wet-etching and/or gauging a semiconductor test item has a light window, an electrochemical cell, a seal ring, sources of light and a camera

摘要

Fitted with a light window (LW) (16), an electrochemical cell (2) contains an electrolyte liquid (6). A seal ring (10) opposite the LW isolates a contact surface (CS) (14) on a semiconductor test item (STI) (12). A first (18) source of light (SOL) executes wet-etching/gauging of the STI. A second SOL (38) outside the center of the LW illuminates and monitors the CS.