| 摘要 |
PROBLEM TO BE SOLVED: To prevent collisions between an objective lens and a sample, when the moving distance during changeover of the objective lens is the same in a motor-driven revolver mounted with an even number of objective lenses. SOLUTION: The six pieces of objective lenses 3a-3f are mounted on an attachment body 2 of the motor-driven revolver 1, and the position of the objective lens 3a, arranged at an optical path position (a), can be detected with a magnetic sensor 5. In addition, switches SW1-SW6 are arranged, corresponding to the objective lenses 3a-3f in a switch unit 12. A storing part 9 of a control part 7 includes a data table for setting the rotating direction inclusive of the case where the moving distances during changeover of the objective lenses 3a-3f are the same. The data table is retrieved, on the basis of the signal from a magnetic sensor 5 and the signal from the switch unit 12, to control the rotation of the attachment body 2. COPYRIGHT: (C)2005,JPO&NCIPI
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