发明名称 |
Method of forming an image sensor with large radius micro-lenses |
摘要 |
A solid state image sensor having micro-lenses connected to each other by filling separations between trapezoidal separated sections of a protection layer with photoresist and a manufacturing method thereof comprises trapezoidal separated sections of the protection layer which is formed on a predetermined lower layer of a semiconductor substrate and convex micro-lenses having a predetermined radius of curvature that are connected to each other by filling the separations between the separated sections of the protection layer with photoresist.
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申请公布号 |
US6933161(B2) |
申请公布日期 |
2005.08.23 |
申请号 |
US20030460573 |
申请日期 |
2003.06.12 |
申请人 |
SAMSUNG ELECTRONICS, CO., LTD. |
发明人 |
KIM SANG-SIK |
分类号 |
H01L27/146;(IPC1-7):H01L21/00 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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