| 摘要 |
FIELD: measuring equipment. ^ SUBSTANCE: device has at least one fixed electrode 3 and at least one moving electrode 6,7, electrically insulated and at distance 10 from said electrode 3. portion of moving electrode 6,7 is made of porous layer 6 of polycrystalline silicon, while said layer in fully assembled component remains as integral portion of said flexible electrode 6,7. ^ EFFECT: possible compensation of temperature deviation and dependence of moisture level of environment. ^ 2 cl, 8 dwg, 1 ex |
