| 摘要 |
PROBLEM TO BE SOLVED: To facilitate the manufacture of a grating device, having low ripple group delay characteristics, by uniformizing the amount of ultraviolet irradiation to a waveguide and facilitating the manufacture of a grating device provided with an arbitrary number of grating shapes. SOLUTION: A device for manufacturing the grating device comprises a laser light source for forming a grating, by noting the method for making average refractive index given to a grating formation part constant, and irradiating the waveguide with ultraviolet rays, an ultraviolet scanning means for scanning with the ultraviolet rays in the longitudinal direction of the waveguide, an ultraviolet irradiation range adjusting means for changing the irradiation range of the ultraviolet rays irradiated to the waveguide, and a stage for scanning the ultraviolet ray irradiation range adjusting means, and forms an arbitrary number of the gratings by a phase mask diffracting an incident ultraviolet into±first order light. COPYRIGHT: (C)2005,JPO&NCIPI |
