| 摘要 |
PROBLEM TO BE SOLVED: To provide a paste applicator which controls a vibration generated on a table or the like, and can form a paste pattern of the desired shape at a high speed and with a high degree of precision without broadening the occupied area of the device even if a substrate becomes of large size. SOLUTION: In order to solve the problems, the applicator consists of two pressure regulators and a high-speed switching valve such that a speed control switching a relative speed variation of the substrate and a nozzle to two steps is carried out in applying to a corner portion, and at the same time, in order to keep an application amount constant, a pneumatic circuit controlling the application amount can be also high-speed switched to two steps. COPYRIGHT: (C)2005,JPO&NCIPI
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