ELECTRODE FORMING METHOD, OPTICAL WAVEGUIDE ELECTRODE FORMING METHOD, SUBSTRATE WITH ELECTRODE, AND OPTICAL WAVEGUIDE TYPE OPTICAL SWITCH

摘要

PROBLEM TO BE SOLVED: To efficiently form an electrode of a three-dimensional shape inside a substrate formed of a transparent material.

SOLUTION: A method for forming an electrode inside a substrate 1 formed of a transparent material comprises a step of forming an aperture 10 inside the substrate 1 by irradiating femto-second laser beams 7 in a condensing manner, and a step of forming the electrode by disposing a conductive material in the aperture 10. An optical waveguide electrode is formed in a vicinity of an optical waveguide core of an optical waveguide having the optical waveguide core inside the substrate formed of the transparent material by the electrode forming method.

COPYRIGHT: (C)2005,JPO&NCIPI