| 发明名称 |
CLEANING MASKS |
| 摘要 |
A method and apparatus for cleaning masks is described. In one embodiment, the invention is a method of cleaning a mask. The method includes placing the mask in a cleaning solution. The method also includes agitating the cleaning solution at a predetermined agitation level for a predetermined period of time. |
| 申请公布号 |
WO2005010947(A3) |
申请公布日期 |
2005.08.18 |
| 申请号 |
WO2004US23596 |
申请日期 |
2004.07.22 |
| 申请人 |
CHEMTRACE PRECISION CLEANING, INC. |
发明人 |
TAN, SAMANTHA;WANG, JIANQI |
| 分类号 |
B08B3/04;B08B3/10;C23G1/02;C23G3/00;H01L21/00 |
主分类号 |
B08B3/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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