发明名称 |
Article coated with zirconium compound film, method for preparing the article and sputtering target for use in coating with the film |
摘要 |
A method for forming a zirconium compound film on a substrate by a sputtering process using a zirconium target which contains a metal (such as tin or zinc) of which the sputtering yield in an argon atmosphere is more than twice that of zirconium in place of a conventional metallic zirconium target. An article coated with the zirconium compound film and a sputtering target used for coating the film are provided. It is desirable that the content of the metal be 1-45 at %, but a third metal can be added thereto.
|
申请公布号 |
US2005178655(A1) |
申请公布日期 |
2005.08.18 |
申请号 |
US20050100462 |
申请日期 |
2005.04.07 |
申请人 |
NIPPON SHEET GLASS CO., LTD. |
发明人 |
ANZAKI TOSHIAKI;INAOKA DAISUKE;KIJIMA YOSHIFUMI |
分类号 |
C03C17/245;B01J35/02;C03C17/34;C23C14/06;C23C14/08;C23C14/34;(IPC1-7):C23C14/32 |
主分类号 |
C03C17/245 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|