| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that, when a transparent ZnS film for a hologram is deposited on the surface of a substrate to be treated, sometimes change in the color tone of the ZnS film can not be detected by the measurement of light transmittance only with an optional specified wavelength. SOLUTION: During deposition of a ZnS film, at least either the light transmittance or light reflectance of the ZnS film is measured, with a first wavelength selected from the wavelength range of 330 to 400 nm and a second specified wavelength selected from the wavelength range of 400 to 800 nm. Then, while change in the color tone of the ZnS film is identified from the light transmittance or light reflectance at the second specified wavelength, the film deposition rate is controlled so that the light transmittance or light reflectance at the first specified wavelength is held within the prescribed range. COPYRIGHT: (C)2005,JPO&NCIPI
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