CHEMICAL MECHANICAL POLISHING APPARATUS,申请号KR20030061557-传众专利搜索

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发明名称	CHEMICAL MECHANICAL POLISHING APPARATUS
摘要
申请公布号	KR100508863(B1)	申请公布日期	2005.08.17
申请号	KR20030061557	申请日期	2003.09.03
申请人		发明人
分类号	B24B37/04;H01L21/304;(IPC1-7):B24B37/02	主分类号	B24B37/04
代理机构		代理人
主权项
地址

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