Infrared radiation detector, has infrared sensor with membrane disposed on semiconductor substrate, and cap with projecting unit made of material having thermal conductivity higher than that of gas present in case

摘要

The detector has a case (200) with a support (210) and a cap (220) having an incidence window (221) traversed by infrared radiation. An infrared sensor (100) has a membrane disposed on a semiconductor substrate. The sensor is placed in the case on the support and is covered by the cap. The cap has a projecting unit (222) made of a material having thermal conductivity higher than that of a gas present in the case.