TOOL FOR MANUFACTURING DIAMOND FILM COATED SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a tool for manufacturing a diamond film coated semiconductor which is a tool for working a lead wire of a semiconductor device etc., and which can suppress the damage due to the static electricity of the semiconductor device during working by preventing the electrostatic charge of the tool. SOLUTION: The tool for manufacturing the diamond film coated semiconductor is coated with a diamond film on a base material surface. The base material is a cemented carbide or cermet. The diamond film is a conductive diamond film containing boron and hydrogen. The average surface roughness of the conductive diamond film is≤0.2μm in Ra. The average grain size of the diamond crystal particles on the surface of the conductive diamond film is≤1.5μm. The electric resistance of the outermost layer is preferably≤1,000Ωcm. COPYRIGHT: (C)2005,JPO&NCIPI