发明名称 |
Microelectrical mechanical structure (MEMS) optical modulator and optical display system |
摘要 |
A microelectrical mechanical out-of-plane thermal buckle-beam actuator is capable of providing transverse-plane movement of shutters. The actuator includes a pair of structural anchors secured to a substrate and one or more thermal buckle-beams secured at respective base ends to the anchors. Each buckle-beam extends substantially parallel to and spaced-apart from the substrate and is releasable from the substrate at points other than at the anchors. The thermal buckle-beam actuators are suitable for use in a microelectrical mechanical optical display system.
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申请公布号 |
US2005172625(A1) |
申请公布日期 |
2005.08.11 |
申请号 |
US20050064410 |
申请日期 |
2005.02.22 |
申请人 |
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发明人 |
STARKWEATHER GARY K.;SINCLAIR MICHAEL J. |
分类号 |
G02F1/015;G02B6/35;G02B26/02;G02B27/18;H04N5/66;H04N5/74;(IPC1-7):G02B26/00;F01B29/10 |
主分类号 |
G02F1/015 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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