| 摘要 |
The invention relates to a method for the production of an ultra barrier layer system by vacuum coating a substrate, said layer system comprises a stack of layers which are embodied as an alternating layer system made of smooth layers and transparent ceramic layers, comprising a smooth layer arranged between two transparent ceramic layers, which are applied by sputtering, whereby a monomer is introduced into an evacuated covering chamber during the deposition of the smooth layer, wherein a magnetron plasma is operated. |
| 申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E. V.;CHARTON, CHRISTOPH;FAHLAND, MATTHIAS;KRUG, MARIO;SCHILLER, NICOLAS;STRAACH, STEFFEN |
发明人 |
CHARTON, CHRISTOPH;FAHLAND, MATTHIAS;KRUG, MARIO;SCHILLER, NICOLAS;STRAACH, STEFFEN |
