发明名称 |
METHOD OF BUILDING A DEFECT DATABASE |
摘要 |
First, a wafer with a plurality of defects generated in a first semiconductor process is provided. A defect inspection is performed to detect the defects on the wafer. Then, an automatic defect classification is performed according to a predetermined defect database having a defect classification recipe generated from a second semiconductor process. After that, a verifying process is further performed by comparing the result of the automatic defect classification with that of a manual defect classification to verify the accuracy of the automatic defect classification.
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申请公布号 |
US2005177264(A1) |
申请公布日期 |
2005.08.11 |
申请号 |
US20040708059 |
申请日期 |
2004.02.06 |
申请人 |
LIN LONG-HUI;KUO FENG-MING;CHENG SU-FEN |
发明人 |
LIN LONG-HUI;KUO FENG-MING;CHENG SU-FEN |
分类号 |
G06F19/00;(IPC1-7):G06F19/00 |
主分类号 |
G06F19/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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