发明名称 |
OPTICAL ELEMENT FOR A LIGHTING SYSTEM |
摘要 |
The invention relates to an optical element for a lighting system for wavelengths <= 193 nm, said lighting system comprising a light source, a field plane and an exit pupil. The invention is characterised in that the optical element has a plurality of facets that are arranged in such a way and have angles of deflection such that each facet receives light from the light source and deflects it towards a discrete point in the field plane. The discrete points are selected in such a way that a field in the field plane is illuminated in a pre-determined form. The facets respectively associated with a discrete point in the field plane illuminate the respectively associated discrete point in the field plane and an associated region of the exit pupil of the lighting system. |
申请公布号 |
WO2004092844(A3) |
申请公布日期 |
2005.08.11 |
申请号 |
WO2004EP03855 |
申请日期 |
2004.04.13 |
申请人 |
CARL ZEISS SMT AG;SINGER, WOLFGANG;ANTONI, MARTIN |
发明人 |
SINGER, WOLFGANG;ANTONI, MARTIN |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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