发明名称 OPTICAL ELEMENT FOR A LIGHTING SYSTEM
摘要 The invention relates to an optical element for a lighting system for wavelengths <= 193 nm, said lighting system comprising a light source, a field plane and an exit pupil. The invention is characterised in that the optical element has a plurality of facets that are arranged in such a way and have angles of deflection such that each facet receives light from the light source and deflects it towards a discrete point in the field plane. The discrete points are selected in such a way that a field in the field plane is illuminated in a pre-determined form. The facets respectively associated with a discrete point in the field plane illuminate the respectively associated discrete point in the field plane and an associated region of the exit pupil of the lighting system.
申请公布号 WO2004092844(A3) 申请公布日期 2005.08.11
申请号 WO2004EP03855 申请日期 2004.04.13
申请人 CARL ZEISS SMT AG;SINGER, WOLFGANG;ANTONI, MARTIN 发明人 SINGER, WOLFGANG;ANTONI, MARTIN
分类号 G03F7/20 主分类号 G03F7/20
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