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发明名称
摘要
申请公布号
JP3682174(B2)
申请公布日期
2005.08.10
申请号
JP19980313585
申请日期
1998.11.04
申请人
发明人
分类号
G01R31/26;G01R31/28;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R31/26
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代理人
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