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发明名称
Method and device for optically inspecting objects on a substrate
摘要
申请公布号
EP1153265(B1)
申请公布日期
2005.08.10
申请号
EP19990964865
申请日期
1999.12.14
申请人
MYDATA AUTOMATION AB
发明人
BOSTROEM, GUNNAR;JOHANNESSON, MATTIAS;SANDGREN, SIMON;AHLEN, HANS
分类号
G01B11/02;G01B11/04;G01N21/89;G01N21/956;G06T1/00;H01L21/52;(IPC1-7):G01B11/04
主分类号
G01B11/02
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