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发明名称
摘要
申请公布号
KR100493013(B1)
申请公布日期
2005.08.01
申请号
KR19980051865
申请日期
1998.11.30
申请人
发明人
分类号
H01L21/283;(IPC1-7):H01L21/283
主分类号
H01L21/283
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