| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an angular velocity sensor capable of diagnosing anomalies, without having to provide a tuning fork oscillator with either a special signal input electrode for abnormality diagnosis or a reference potential ground electrode for reducing errors in angular velocity detection. <P>SOLUTION: Switches 45 and 48 are used for generating in-phase drive signals, in output terminals 49 and 50 to bend arms 2 and 3 in the same Z-axis direction. Electric charges, acquired from 10th and 12th electrodes 22 and 25 provided for the arms 2 and 3, are amplified by first and second amplifiers 62 and 63. Their outputs are inputted to a differential amplifier 64; its output is compared with a prescribed value transmitted from a reference value generating means 82 by a comparator 81; and when the output exceeds the prescribed value, the presence of abnormality is determined. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
