| 摘要 |
PROBLEM TO BE SOLVED: To practically eliminate errors regarding temperature characteristics without using temperature sensor. SOLUTION: The detection timing of sine wave outputted from a contact type displacement measuring head varies in amplitude and phase difference depending on the atmospheric temperature. If the detection timing is intentionally delayed (phase differenceϕ>0), the increase part is larger than the decreasing part for the measurement head which has characteristics that the lag in the phase differenceΔθhas positive characteristics, the measurement error occurs increasingly. By experimentally setting the phase differenceϕpreferably, the measurement error becomes practically zero. COPYRIGHT: (C)2005,JPO&NCIPI
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