Film like electrode member for electrostatic motor

摘要

A film-like electrode member, used as a stationary member or a movable member of an electrostatic motor. The film-like electrode member is provided with an insulating substrate including a major surface and a back surface opposite to the major surface; a plurality of electrodes arranged along the major surface of the insulating substrate at predetermined intervals; a main section including at least a part of the plural electrodes and of the insulating substrate carrying the electrodes; a locally thick section integrally joined to the main section and having a thickness larger than the main section; and a conducting element formed on the thick section and connected to the plurality of electrodes. The thick section includes a protrusion element having insulating properties and locally protruding from the major surface of the insulating substrate; and the conducting element is formed continuously on the insulating substrate and the protrusion element. The major surface of the insulating substrate of a first film-like electrode member is disposed to be opposed to the back surface of the insulating substrate of a second film-like electrode member, and the thick section of the first film-like electrode member and the thick section of the second film-like electrode member is brought into abutment with each other.