Defect test method and apparatus for gray-tone mask,申请号KR20010061016-传众专利搜索

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发明名称	Defect test method and apparatus for gray-tone mask
摘要
申请公布号	KR100503274(B1)	申请公布日期	2005.07.25
申请号	KR20010061016	申请日期	2001.09.29
申请人		发明人
分类号	G01B11/30;G01N21/956;G03F1/84;H01L21/027;(IPC1-7):G01B11/30	主分类号	G01B11/30
代理机构		代理人
主权项
地址

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