| 摘要 |
PROBLEM TO BE SOLVED: To provide an inkjet printhead capable of enhancing the durability by suppressing defects formed in a heat generation layer and also a manufacturing method for the head. SOLUTION: In this manufacturing method for the heat transfer type inkjet printhead 200, the heat generation layer 230 and an electrode layer 240 overlie a substrate 210, and a protective layer 250 is formed by making a first protective layer 260 and a second protective layer 270 overlie on the top surface of the electrode layer 240 in an exposed part inside an ink chamber 215 which is formed by making an ink chamber barrier 280 and a nozzle plate 290 overlie on the top surface of the protective layer 250. The second protective layer overlie on the first protective layer after any defect generated during the formation of the first protective layer is removed by applying plasma to the first protective layer. Thereby, it is possible to prevent a defect formed in the first protective layer and a failure in the heat generation layer caused by pin holes when the inkjet head is driven. COPYRIGHT: (C)2005,JPO&NCIPI
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