| 摘要 |
PROBLEM TO BE SOLVED: To provide a CMOS image sensor capable of minimizing the occurrence of defect due to impurity ion implantation at the boundary of an active region and an isolation film beneath the gate electrode of a transistor constituting a CMOS image sensor, and to provide its fabrication process. SOLUTION: The CMOS image sensor comprises a first conductivity type semiconductor substrate provided with a plurality of transistors, an active region overlapping the gate electrode of the transistor, an isolation region contiguous to the active region, and a first conductivity type heavily doped impurity ion region formed between the active region and the isolation region. COPYRIGHT: (C)2005,JPO&NCIPI
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