| 摘要 |
PROBLEM TO BE SOLVED: To suppress occurrence of static electricity at the time of washing a substrate using a high-speed jet water stream. SOLUTION: In a pressurized water injector which jets out a high-speed jet water stream forward from the end of a nozzle after receiving pressurized water, the nozzle is made of metal and is grounded, and an annular electrode is installed around the end of the nozzle and DC high voltage having the same polarity as that of static electricity occurring on the water stream side by the injection of the jet water stream is applied to the annular electrode. COPYRIGHT: (C)2005,JPO&NCIPI
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