发明名称 |
LOCALIZED SYNTHESIS AND SELF-ASSEMBLY OF NANOSTRUCTURES |
摘要 |
Systems and methods for local synthesis of silicon nanowires and carbon nanotubes, as well as electric field assisted self-assembly of silicon nanowires and carbon nanotubes, are described. By employing localized heating in the growth of the nanowires or nanotubes, the structures can be synthesized on a device in a room temperature chamber without the device being subjected to overall heating. The method is localized and selective, and provides for a suspended microstructure to achieve the thermal requirement for vapor deposition synthesis, while the remainder of the chip or substrate remains at room temperature. Furthermore, by employing electric field assisted self-assembly techniques according to the present invention, it is not necessary to grow the nanotubes and nanowires and separately connect them to a device. Instead, the present invention provides for self-assembly of the nanotubes and nanowires on the devices themselves, thus providing for nano- to micro-integration. |
申请公布号 |
WO2005065425(A2) |
申请公布日期 |
2005.07.21 |
申请号 |
WO2004US44089 |
申请日期 |
2004.12.29 |
申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA;LIN, LIWEI;ENGLANDER, ONGI;CHRISTENSEN, DANE |
发明人 |
LIN, LIWEI;ENGLANDER, ONGI;CHRISTENSEN, DANE |
分类号 |
C01B31/02;C01B33/02;C23C16/02;C23C16/24;C23C16/26;C23C16/44;H01L21/20;H01L29/00;H01L51/00 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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