| 摘要 |
PROBLEM TO BE SOLVED: To enable to carry out evaluation of a sample with a high throughput and a high S/N ratio. SOLUTION: When electron beam irradiated from an electron gun is irradiated on a sample W placed on an X-Y-θstage 9-1 through an electrostatic lens 4-1 and an objective lens 11-1 or the like, secondary electron or reflective electron is emitted from the sample W. An incident angle of the primary electron beam is set at 35°or more through adjustment of a deflector 8-1. Emitted electron from the sample is guided toward the vertical direction to be imaged at a detector. The detector is composed of an MCP 14-1, a phosphor plate 15-1, a relay lens 16-1 and a TDI (or a CCD) 17-1, and electric signals from the TDI 7-1 is supplied to a personal computer 18-1 for image processing to obtain a two-dimensional image of the sample. COPYRIGHT: (C)2005,JPO&NCIPI
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