发明名称 |
Electrode material for forming stamper and thin film for forming stamper. |
摘要 |
To present a material for stamper free from deterioration of stamper quality due to reaction with an electron-attracting radical contained in the resist material. An electrode formed on the surface of a patterned resist film 2 for electrocasting a stamper material is formed of a nickel alloy thin film 3 comprising Ni element as a principal component, and Ru element added in a range of less than 25 percent by weight. |
申请公布号 |
HK1044617(A1) |
申请公布日期 |
2005.07.15 |
申请号 |
HK20020106088 |
申请日期 |
2002.08.20 |
申请人 |
PIONEER CORPORATION;FURUYA METAL CO., LTD. |
发明人 |
MASAHIRO KATSUMURA;TETSUYA IIDA;TAKASHI UENO |
分类号 |
C25D1/00;C25D1/10;G11B7/26;(IPC1-7):G11B;C25D |
主分类号 |
C25D1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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