| 摘要 |
<p>A spin coating device has a rotating table for holding a disk substrate, a rotation mechanism for rotating the rotating table, a coater cover provided so as to surround the rotating table and receiving liquid thrown off from the disk substrate, an inner cup for receiving the liquid dropping along the coater cover and not discharging the liquid, and a coater cup for supporting the inner cup. The inner cup is removable from the coater cup.</p> |
