发明名称 |
Photonic structures, devices, and methods |
摘要 |
Photonic crystal structures are made by a method including steps of providing a substrate, depositing at least one planar layer to form a stack, each planar layer of the stack comprising two or more sublayers having different sublayer refractive indices, depositing a hard mask material, depositing an imprintable material over the hard mask material, patterning the imprintable material by imprinting an array of depressions, and directionally etching at the depressions a regular array of openings through the hard mask material and the stack.
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申请公布号 |
US2005150864(A1) |
申请公布日期 |
2005.07.14 |
申请号 |
US20040755955 |
申请日期 |
2004.01.12 |
申请人 |
STASIAK JAMES;CHAMPION DAVID;PETERS KEVIN;COULMAN DONALD J.;CRUZ-URIBE TONY S. |
发明人 |
STASIAK JAMES;CHAMPION DAVID;PETERS KEVIN;COULMAN DONALD J.;CRUZ-URIBE TONY S. |
分类号 |
G02B6/122;G03F7/00;(IPC1-7):C23F1/00 |
主分类号 |
G02B6/122 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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