| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To prevent a diaphragm from being deformed or an anodic joint to a channel substrate from peeling off in a film formation/crystallization process of a piezoelectric element. <P>SOLUTION: After a glass diaphragm 6 having a high strain point such as borosilicate glass is anodically joined to the channel substrate 1 forming a pressure generation chamber 2, an orifice 4 and the like, the glass diaphragm 6 is polished and a piezoelectric film 8 such as a PZT film as a piezoelectric element 7 component, and upper and lower electrodes 9a and 9b overlie the thinned glass diaphragm 6. During or after the formation of the piezoelectric film 8, the deformation of the glass diaphragm 6 is prevented during heat treatment by crystallizing the piezoelectric film 8 at a crystallization temperature not higher than the strain point of the glass diaphragm 6. The diaphragm 6 anodically joined is thinned and polished to a thickness of not greater than 10μm and is so flexed that with this flexion, the anodic joint is prevented from peeling off caused by thermal strain during heat treatment for the crystallization of the piezoelectric element 8. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
