| 发明名称 |
METHOD OF ACTUATING LITHOGRAPHIC DEVICE OR LITHOGRAPHIC PROCESSING CELL, LITHOGRAPHIC DEVICE AND LITHOGRAPHIC PROCESSING CELL |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide the preparing method of a schedule that operates a machine forming at least a part of a lithographic device or a lithographic processing cell. <P>SOLUTION: In the method, a plurality of weighting factors on each of a plurality of qualities that affect the results of a lithographic process are received. The optimal schedule of a task that should be executed is prepared to complete the lithographic process, the optimal schedule is a schedule that brings about the results having the maximum total quality value, and the total quality is the total of each value of the qualities and each of the weighting factors. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
| 申请公布号 |
JP2005191571(A) |
申请公布日期 |
2005.07.14 |
| 申请号 |
JP20040371509 |
申请日期 |
2004.12.22 |
| 申请人 |
ASML NETHERLANDS BV |
发明人 |
NIEUWELAAR NORBERTUS JOSEPHUS MARTINUS VAN DEN;ONVLEE JOHANNES;VAN LIEROP HENRICUS PETRUS JOHANNUS;BRASPENNING NIELS CORNELIS WILHELMUS MARIA;ROODA JACOBUS E |
| 分类号 |
G03F7/20;G05B19/418;G06F19/00;H01L21/027;(IPC1-7):H01L21/027 |
主分类号 |
G03F7/20 |
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