| 摘要 |
PROBLEM TO BE SOLVED: To prevent a part of a metallic washer 21 from being brought into point-contact with a heater 207 and to prevent dissolution of a metal component by point contact of the heater and the metal component, electric discharge occurring after that and burning and destruction of the heater if a center of a washer 22 shifts, and the heater 207 and an electrode 253 are fixed in a state where a fixing means 20 inclines when a work for fixing the electrode 253 and the heater 207 is to be performed. SOLUTION: The substrate processor is provided with a processing chamber processing a substrate, a heating object heating the substrate and the electrode supplying power to the heating object. When the heating object is screwed to the electrode, the first washer formed of at least carbon and the second washer formed of a metal whose outer diameter is smaller than the first washer are used, and the electrode, the heating object, the first washer, the second washer and a screw are screwed in this order. COPYRIGHT: (C)2005,JPO&NCIPI
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