METHOD FOR FORMING SILOXANE POLYMER COATING FILM AND OPTICAL WAVEGUIDE

摘要

PROBLEM TO BE SOLVED: To provide a siloxane polymer coating film having excellent crack resistance and excellent reliability on a temperature cycle test, a humidity loaded test or the like, and to provide an optical waveguide using the coating. SOLUTION: The method for forming a siloxane polymer coating film includes: a first step of applying a coating liquid composition for the formation of a siloxane polymer coating film containing a silanol group on a substrate and dehydrating and polymerizing the silanol groups with each other to form a siloxane polymer coating film; and then a second step of immersing the siloxane polymer coating film in an acid solution to promote dehydration polymerization of silanol groups remaining in the siloxane polymer coating film. The siloxane polymer coating film obtained by the above method and an optical waveguide produced by using the coating film have excellent crack resistance and excellent reliability on a temperature cycle test, a humidity loaded test or the like. COPYRIGHT: (C)2005,JPO&NCIPI