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发明名称
WAFER DETECT METHOD
摘要
申请公布号
KR20050069758(A)
申请公布日期
2005.07.05
申请号
KR20030102164
申请日期
2003.12.31
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
KIM, KYU SUNG
分类号
H01L21/324;(IPC1-7):H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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