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发明名称
REMOVABLE ELECTRODE APERTURE OF ION IMPLANTATION EQUIPMENT
摘要
申请公布号
KR20050069446(A)
申请公布日期
2005.07.05
申请号
KR20030101559
申请日期
2003.12.31
申请人
DONGBUANAM SEMICONDUCTOR INC.
发明人
KIM, KYU SUNG;LEE, MU HYUNG
分类号
H01L21/265;(IPC1-7):H01L21/265
主分类号
H01L21/265
代理机构
代理人
主权项
地址
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