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发明名称
形成碳奈米管的方法
摘要
碳奈米管系使用电浆化学沈积法在基材上形成。等奈米管长成以后,在新形成的奈米管结构上进行后处理步骤。后处理由已长成的奈米管壁移除石墨及其他碳粒并控制奈米管层的厚度。在相同的基材温度时以电浆进行后处理。对于后处理,以含氢气的气体作为电浆来源气体。在由奈米管生长步骤转变至后处理步骤时,利用前述的纯化气体使电浆加工室内的压力安定化而不需关闭加工室内的电浆。这可排除对于洗净及抽空电浆加工室的需求。
申请公布号
TW200521272
申请公布日期
2005.07.01
申请号
TW092136437
申请日期
2003.12.22
申请人
理想显示公司
发明人
康盛球;禹庆
分类号
C30B25/18
主分类号
C30B25/18
代理机构
代理人
林志刚
主权项
地址
美国
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